Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5737496 | Active neural network control of wafer attributes in a plasma etch process | Robert C. Frye, Thomas Richard Harry, Edward A. Rietman | 1998-04-07 |
| 5643838 | Low temperature deposition of silicon oxides for device fabrication | Robert E. Dean, Pang Dow Foo, Leonard J. Olmer | 1997-07-01 |
| 5467883 | Active neural network control of wafer attributes in a plasma etch process | Robert C. Frye, Thomas Richard Harry, Edward A. Rietman | 1995-11-21 |
| 5013691 | Anisotropic deposition of silicon dioxide | Leonard J. Olmer | 1991-05-07 |
| 4675089 | Low temperature deposition method for high quality aluminum oxide films | Leonard J. Olmer | 1987-06-23 |
| 4491499 | Optical emission end point detector | Leslie G. Jerde, Kevin A. Muething, Len Y. Tsou | 1985-01-01 |