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High-volume fast separation of multi-phase components in fluid suspensions |
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Combined acoustic micro filtration and phononic crystal membrane particle separation |
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Phononic crystal desalination system and methods of use |
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Combined acoustic micro filtration and phononic crystal membrane particle separation |
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Large scale process control by driving factor identification |
Jill Card |
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Scalable, hierarchical control for complex processes |
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Carrier head with controllable struts for improved wafer planarity |
Stephen A. Neston |
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Dynamic data visualization |
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Plasma etch end point detection process |
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| 5737496 |
Active neural network control of wafer attributes in a plasma etch process |
Robert C. Frye, Thomas Richard Harry, Earl R. Lory |
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| 5653894 |
Active neural network determination of endpoint in a plasma etch process |
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Active neural network control of wafer attributes in a plasma etch process |
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