Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4660979 | Method and apparatus for automatically measuring semiconductor etching process parameters | — | 1987-04-28 |
| 4651673 | CVD apparatus | — | 1987-03-24 |
| 4518455 | CVD Process | — | 1985-05-21 |
| 4491499 | Optical emission end point detector | Leslie G. Jerde, Earl R. Lory, Len Y. Tsou | 1985-01-01 |