Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341048 | Porous plug for electrostatic chuck gas delivery | Alexander SULYMAN, Xue Yang Chang, Timothy Joseph Franklin, Joseph F. Sommers | 2025-06-24 |
| 12211734 | Lift pin mechanism | Alexander SULYMAN, Carlaton WONG, Rajinder Dhindsa, Timothy Joseph Franklin, Steven E. Babayan +2 more | 2025-01-28 |
| 12198903 | Plasma resistant arc preventative coatings for manufacturing equipment components | Joseph F. Sommers, Joseph Behnke, Xue Yang Chang, Alexander SULYMAN, Timothy Joseph Franklin +1 more | 2025-01-14 |
| 12020977 | Lift pin assembly | Alexander SULYMAN, Timothy Joseph Franklin, Carlaton WONG, Xue Yang Chang | 2024-06-25 |
| 11551916 | Sheath and temperature control of a process kit in a substrate processing chamber | Jaeyong Cho, Rajinder Dhindsa, James Rogers | 2023-01-10 |
| 11551960 | Helical plug for reduction or prevention of arcing in a substrate support | Reyn Tetsuro WAKABAYASHI, Hamid Noorbakhsh | 2023-01-10 |
| 11543954 | Scroll activity detection for selection and display of information | — | 2023-01-03 |
| 11488852 | Methods and apparatus for reducing high voltage arcing in semiconductor process chambers | Hamid Noorbakhsh, Kartik Ramaswamy | 2022-11-01 |
| 11424096 | Temperature controlled secondary electrode for ion control at substrate edge | Hamid Noorbakhsh, Kartik Ramaswamy | 2022-08-23 |
| 11171030 | Methods and apparatus for dechucking wafers | Hamid Noorbakhsh, Haitao Wang, Sergio Fukuda Shoji | 2021-11-09 |
| 10930540 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Haitao Wang, Evans Lee, Jaeyong Cho, Hamid Noorbakhsh +3 more | 2021-02-23 |
| 10847347 | Edge ring assembly for a substrate support in a plasma processing chamber | Hamid Noorbakhsh, Reyn Tetsuro WAKABAYASHI | 2020-11-24 |
| 10504765 | Electrostatic chuck assembly having a dielectric filler | Kartik Ramaswamy, Haitao Wang, Evans Lee, Jaeyong Cho, Hamid Noorbakhsh +3 more | 2019-12-10 |
| 9905402 | Plasma processing chamber with a grounded electrode assembly | Arnold Kholodenko | 2018-02-27 |
| 8739805 | Confinement of foam delivered by a proximity head | Arnold Kholodenko, Cheng-Yu Lin, Leon Ginzburg, Mark Mandelboym, Gregory A. Tomasch | 2014-06-03 |
| 8584613 | Single substrate processing head for particle removal using low viscosity fluid | Arnold Kholodenko, Cheng-Yu Lin, Leon Ginzburg, Mark Mandelboym, Gregory A. Tomasch | 2013-11-19 |
| 8557051 | Method for using generator for foam to clean substrate | Arnold Kholodenko, Gregory A. Tomasch, Cheng-Yu Lin | 2013-10-15 |
| 8261905 | Wafer carrier drive apparatus and method for operating the same | Arnold Kholodenko, George Khait | 2012-09-11 |
| 8161984 | Generator for foam to clean substrate | Arnold Kholodenko, Gregory A. Tomasch, Cheng-Yu Lin | 2012-04-24 |
| 7743730 | Apparatus for an optimized plasma chamber grounded electrode assembly | Arnold Kholodenko | 2010-06-29 |
| 7226514 | Spin-rinse-dryer | Brian J. Brown, David G. Andeen, Svetlana Sherman, John M. White, Michael Sugarman +2 more | 2007-06-05 |
| 6575177 | Semiconductor substrate cleaning system | Brian J. Brown, Fred C. Redeker | 2003-06-10 |
| 6516816 | Spin-rinse-dryer | Brian J. Brown, David G. Andeen, Svetlana Sherman, John M. White, Michael Sugarman +2 more | 2003-02-11 |
| 6474712 | Gripper for supporting substrate in a vertical orientation | Boris Govzman, Manoocher Birang, Michael Sugarman | 2002-11-05 |
| 6406359 | Apparatus for transferring semiconductor substrates using an input module | Manoocher Birang, Brian J. Brown, Michael Sugarman | 2002-06-18 |