Plasma resistant arc preventative coatings for manufacturing equipment components

Assignee

• Applied Materials

Inventors

• Joseph F. Sommers (14 patents)
• Joseph Behnke (18 patents)
• Xue Yang Chang (16 patents)
• Anwar Husain (32 patents)
• Alexander SULYMAN (6 patents)
• Timothy Joseph Franklin (38 patents)
• David J. Coumou (52 patents)

View full patent text on Google Patents →