Issued Patents All Time
Showing 25 most recent of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360512 | Multi-step predictive control system | Chad S. Samuels | 2025-07-15 |
| 12301199 | Impedance tuning utility of vector space defined by transmission line quantities | David Peterson | 2025-05-13 |
| 12198903 | Plasma resistant arc preventative coatings for manufacturing equipment components | Joseph F. Sommers, Joseph Behnke, Xue Yang Chang, Anwar Husain, Alexander SULYMAN +1 more | 2025-01-14 |
| 12183548 | High bandwidth architecture for centralized coherent control at the edge of processing tool | — | 2024-12-31 |
| 12165843 | Fleetwide impedance tuning performance optimization | Nathan Ransom, Priya Gambhire, JEREMY ZUCH, Senthil Kumar Vadivelu | 2024-12-10 |
| 12142461 | Control and prediction of multiple plasma coupling surfaces and corresponding power transfer | Zhi Wang, Tao Zhang, David Peterson | 2024-11-12 |
| 12061215 | RF measurement from a transmission line sensor | Xiaopu Li, Michelle SanPedro | 2024-08-13 |
| 11990324 | Adaptive predictive control system | Chad S. Samuels | 2024-05-21 |
| 11531312 | Adaptive control for a power generator | Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV, Shaun Smith | 2022-12-20 |
| 11042140 | Adaptive control for a power generator | Yuriy Elner, Aung Toe, Daniel M. Gill, Eldridge M. Mount, IV, Shaun Smith | 2021-06-22 |
| 10998170 | Method for ion mass separation and ion energy control in process plasmas | Yusuke Yoshida, Sergey Voronin, Alok Ranjan, Scott E. White | 2021-05-04 |
| 10910197 | Impedance matching network model based correction scheme and performance repeatability | — | 2021-02-02 |
| 10821542 | Pulse synchronization by monitoring power in another frequency band | Nicholas Nelson | 2020-11-03 |
| 10692698 | Feedback control by RF waveform tailoring for ion energy distribution | Ross REINHARDT, Yuriy Elner, Daniel M. Gill, Richard Pham | 2020-06-23 |
| 10666206 | Supervisory control of radio frequency (RF) impedance tuning operation | Ross REINHARDT, Yuriy Elner, Daniel M. Gill | 2020-05-26 |
| 10536130 | Balancing RF circuit and control for a cross-coupled SIMO distribution network | Dennis M. Brown, Jeongseok Jang, Jin Huh | 2020-01-14 |
| 10395895 | Feedback control by RF waveform tailoring for ion energy distribution | Ross REINHARDT, Yuriy Elner, Daniel M. Gill, Richard Pham | 2019-08-27 |
| 10304669 | Adaptive counter measure control thwarting IMD jamming impairments for RF plasma systems | Dennis M. Brown, Eldridge M. Mount, IV | 2019-05-28 |
| 10229816 | Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network | Dennis M. Brown, Aaron T. Radomski, Mariusz Oldziej, Yogendra K. Chawla, Daniel J. Lincoln | 2019-03-12 |
| 9876476 | Supervisory control of radio frequency (RF) impedance tuning operation | Ross REINHARDT, Yuriy Elner, Daniel M. Gill | 2018-01-23 |
| 9721758 | Unified RF power delivery single input, multiple output control for continuous and pulse mode operation | Ross REINHARDT, Yuiry ELNER, Daniel M. Gill | 2017-08-01 |
| 9509266 | Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing | Richard Pham | 2016-11-29 |
| 9336995 | Multiple radio frequency power supply control of frequency and phase | Michael L. Kirk, Daniel M. Gill | 2016-05-10 |
| 9294136 | Frequency interference detection and correction | — | 2016-03-22 |
| 9291649 | On the enhancements of planar based RF sensor technology | Dennis M. Brown, Raymond Brooks | 2016-03-22 |