MK

Michael L. Kirk

MI Mks Instruments: 2 patents #156 of 442Top 40%
ET Eni Technology: 1 patents #15 of 27Top 60%
Overall (All Time): #1,506,633 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
9336995 Multiple radio frequency power supply control of frequency and phase David J. Coumou, Daniel M. Gill 2016-05-10
6983215 RF metrology characterization for field installation and serviceability for the plasma processing industry David J. Coumou, Clifford C. Weatherell, Kevin P. Nasman 2006-01-03
6707255 Multirate processing for metrology of plasma RF source David J. Coumou 2004-03-16