Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6983215 | RF metrology characterization for field installation and serviceability for the plasma processing industry | David J. Coumou, Michael L. Kirk, Kevin P. Nasman | 2006-01-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6983215 | RF metrology characterization for field installation and serviceability for the plasma processing industry | David J. Coumou, Michael L. Kirk, Kevin P. Nasman | 2006-01-03 |