Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9337003 | Plasma processing apparatus and constituent part thereof | Takahiro Murakami | 2016-05-10 |
| 8821742 | Plasma etching method | Ryoichi Yoshida, Tetsuo Yoshida, Michishige Saito, Hayato Aoyama, Akira Obi +1 more | 2014-09-02 |
| 7658816 | Focus ring and plasma processing apparatus | Akira Koshiishi, Hideaki Tanaka, Nobuyuki Okayama, Masaaki Miyagawa, Shunsuke Mizukami +5 more | 2010-02-09 |