Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Packaging insert for a process chamber component

Packaging insert for a process chamber component

US Patent D1092213 · Granted Sep 9, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Ceramic engineering by grading materials2025
Efficient dechucking and particle management in process chambers2025
Modular substrate support assembly2025
Parallel atomic layer deposition of target element interiors2025
Semiconductor chamber components with advanced dual layer nickel-containing coat2025
Semiconductor chamber components with advanced coating techniques2025
Semiconductor chamber components with advanced coating techniques2025
Plasma resistant arc preventative coatings for manufacturing equipment component2025
Minimal contact packaging for process chamber components2024
Minimal contact packaging for process chamber components2024
Minimal contact packaging for process chamber components2024
Minimal contact packaging for process chamber components2024