Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6303895 | Method and apparatus for controlling a temperature of a wafer | Hamid Noorbakhsh | 2001-10-16 |
| 6140612 | Controlling the temperature of a wafer by varying the pressure of gas between the underside of the wafer and the chuck | Hamid Noorbakhsh | 2000-10-31 |
| 5911833 | Method of in-situ cleaning of a chuck within a plasma chamber | Dean R. Denison, William Harshbarger, C. Robert Koemtzopoulos, Felix Kozakevich, David Trussell | 1999-06-15 |
| 5880922 | Multilayered electrostatic chuck and method of manufacture thereof | — | 1999-03-09 |
| 5671116 | Multilayered electrostatic chuck and method of manufacture thereof | — | 1997-09-23 |
| 5548470 | Characterization, modeling, and design of an electrostatic chuck with improved wafer temperature uniformity | David E. Kotecki, Stephan Lassig, Kurt A. Olson, Anthony J. Ricci | 1996-08-20 |
| 4544311 | Mask alignment apparatus | — | 1985-10-01 |