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Confinement of foam delivered by a proximity head |
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Single substrate processing head for particle removal using low viscosity fluid |
Arnold Kholodenko, Cheng-Yu Lin, Leon Ginzburg, Mark Mandelboym, Anwar Husain |
2013-11-19 |
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Method for using generator for foam to clean substrate |
Arnold Kholodenko, Anwar Husain, Cheng-Yu Lin |
2013-10-15 |
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Generator for foam to clean substrate |
Arnold Kholodenko, Anwar Husain, Cheng-Yu Lin |
2012-04-24 |
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Unitary slot valve actuator with dual valves |
— |
2006-10-31 |
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Unitary slot valve actuator with dual valves |
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2006-06-13 |
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Unitary slot valve actuator with dual valves |
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2005-07-05 |
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Single shaft, dual cradle vacuum slot valve |
Tony R. Kroeker |
2003-08-05 |
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Methods of implementing a single shaft, dual cradle vacuum slot valve |
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2003-05-20 |
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Single shaft dual cradle vacuum slot valve |
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Process chemistry resistant manometer |
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