Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Single shaft dual cradle vacuum slot valve

Single shaft dual cradle vacuum slot valve

US Patent 6390448 · Granted May 21, 2002

Estimated economic value: $10,610,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods and apparatus for displacing fluids from substrates using supercritical 2015
Confinement of foam delivered by a proximity head2014
Single substrate processing head for particle removal using low viscosity fluid2013
Method for using generator for foam to clean substrate2013
Generator for foam to clean substrate2012
Cluster tool process chamber having integrated high pressure and vacuum chambers2010
Cluster tool process chamber having integrated high pressure and vacuum chambers2008
Unitary slot valve actuator with dual valves2006
Unitary slot valve actuator with dual valves2006
Unitary slot valve actuator with dual valves2005
Single wafer load lock with internal wafer transport2004
Single shaft, dual cradle vacuum slot valve2003