Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8900374 | Method for substrate cleaning including movement of substrate below substrate cleaning module | Cheng-Yu Lin, Mark Kawaguchi, Mark Wilcoxson, Russell Martin | 2014-12-02 |
| 8757177 | Multi-stage substrate cleaning method and apparatus | Arnold Kholodenko, Katrina Mikhaylichenko, Cheng-Yu Lin, Mark Wilcoxson, Mark Kawaguchi | 2014-06-24 |
| 8739805 | Confinement of foam delivered by a proximity head | Arnold Kholodenko, Cheng-Yu Lin, Mark Mandelboym, Gregory A. Tomasch, Anwar Husain | 2014-06-03 |
| 8584613 | Single substrate processing head for particle removal using low viscosity fluid | Arnold Kholodenko, Cheng-Yu Lin, Mark Mandelboym, Gregory A. Tomasch, Anwar Husain | 2013-11-19 |
| 8317934 | Multi-stage substrate cleaning method and apparatus | Arnold Kholodenko, Katrina Mikhaylichenko, Cheng-Yu Lin, Mark Wilcoxson, Mark Kawaguchi | 2012-11-27 |
| 7849554 | Apparatus and system for cleaning substrate | Cheng-Yu Lin, Mark Kawaguchi, Mark Wilcoxson, Russell Martin | 2010-12-14 |