Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10370133 | Vacuum packing monitoring and control system | Michael Baker | 2019-08-06 |
| 8900400 | Proximity head having a fluid resistor | Arnold Kholodenko, Cheng-Yu Lin | 2014-12-02 |
| 8900374 | Method for substrate cleaning including movement of substrate below substrate cleaning module | Cheng-Yu Lin, Mark Kawaguchi, Mark Wilcoxson, Leon Ginzburg | 2014-12-02 |
| 8317966 | Apparatus for substantially uniform fluid flow rates relative to a proximity head in processing of a wafer surface by a meniscus | Arnold Kholodenko, Cheng-Yu Lin | 2012-11-27 |
| 8291921 | Removing bubbles from a fluid flowing down through a plenum | Encrico Magni | 2012-10-23 |
| 7849554 | Apparatus and system for cleaning substrate | Cheng-Yu Lin, Mark Kawaguchi, Mark Wilcoxson, Leon Ginzburg | 2010-12-14 |
| 7699634 | High power electrical connector for a laminated heater | Arnold Kholodenko, John Rasnick, Christopher Kimball | 2010-04-20 |
| 7393432 | RF ground switch for plasma processing system | Rajinder Dhindsa, Felix Kozakevich, Eric H. Lenz | 2008-07-01 |
| 7390151 | Helical cutter head and helical cutting blade for use therewith | Raymond Martin | 2008-06-24 |