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Electrostatic chuck with ceramic monolithic body |
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Electrostatically clamped edge ring |
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Multi-plate electrostatic chucks with ceramic baseplates |
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Electrostatically clamped edge ring |
Keith Gaff, Feng Wang |
2021-02-16 |
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Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode |
Keith Gaff, Alexander Matyushkin, Zhigang Chen, Keith Comendant |
2020-10-13 |
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ESC assembly including an electrically conductive gasket for uniform RF power delivery therethrough |
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2018-06-19 |
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Electrostatically clamped edge ring |
Keith Gaff, Feng Wang |
2018-03-20 |
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Electrostatic chuck including declamping electrode and method of declamping |
Harmeet Singh, Keith Gaff, Tyler Gloski |
2015-08-04 |
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Methods for measuring a set of electrical characteristics in a plasma |
Eric A. Hudson, Douglas Keil, Alexei Marakhtanov |
2011-08-09 |
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Adjustable height PIF probe |
Eric A. Hudson, Douglas Keil, Alexei Marakhtanov |
2011-01-11 |
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Plasma processing chamber with an apparatus for measuring a set of electrical characteristics in a plasma |
Eric A. Hudson, Douglas Keil, Alexei Marakhtanov |
2010-05-25 |
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High power electrical connector for a laminated heater |
Arnold Kholodenko, Russell Martin, John Rasnick |
2010-04-20 |
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Adjustable height PIF probe |
Eric A. Hudson, Douglas Keil, Alexei Marakhtanov |
2009-01-20 |
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Apparatus for measuring a set of electrical characteristics in a plasma |
Eric A. Hudson, Douglas Keil, Alexei Marakhtanov |
2008-01-15 |
| 6449560 |
Sonic well logging with multiwave processing utilizing a reduced propagator matrix |
— |
2002-09-10 |
| 5999484 |
Methods of analyzing stoneley waveforms and characterizing underground formations |
Pawel Lewicki |
1999-12-07 |
| 5687138 |
Methods of analyzing stoneley waveforms and characterizing underground formations |
Pawel Lewicki |
1997-11-11 |
| 5587966 |
Sonic well logging methods and apparatus for processing flexural wave in optimal frequency band |
David J. Scheibner |
1996-12-24 |
| 5521882 |
Measurement of formation characteristics using acoustic borehole tool having sources of different frequencies |
Ralph M. D'Angelo, Sergio Kostek, Thomas J. Plona, Kenneth W. Winkler |
1996-05-28 |
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Sonic well logging methods and apparatus utilizing dispersive wave processing |
— |
1994-01-11 |
| 5226018 |
Geophysical prospecting method using pseudo-random pulse sequences |
Chung Chang, Benoit Froelich |
1993-07-06 |
| 5146432 |
Method for making cement impedance measurements with characterized transducer |
Sevig Ayter |
1992-09-08 |
| 4928269 |
Determining impedance of material behind a casing in a borehole |
Fred E. Stanke, Curtis Randall, Andrew Hayman |
1990-05-22 |
| 4594691 |
Sonic well logging |
Thomas L. Marzetta |
1986-06-10 |
