Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9101038 | Electrostatic chuck including declamping electrode and method of declamping | Harmeet Singh, Christopher Kimball, Keith Gaff | 2015-08-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9101038 | Electrostatic chuck including declamping electrode and method of declamping | Harmeet Singh, Christopher Kimball, Keith Gaff | 2015-08-04 |