Issued Patents All Time
Showing 25 most recent of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9619878 | Inspecting high-resolution photolithography masks | Ilya Toytman, David Alles, Gregg Anthony Inderhees, Stanley Stokowski, Stanley E. Mehdi Vaez-Iravani | 2017-04-11 |
| 9165742 | Inspection site preparation | Richard R. Simmons, Douglas K. Masnaghetti, Mark A. McCord, Scott A. Young, Christopher Sears | 2015-10-20 |
| 8107073 | Diffraction order sorting filter for optical metrology | Adam E. Norton, Holger Tuitje | 2012-01-31 |
| 7924422 | Calibration method for optical metrology | Adam E. Norton, Holger Tuitje | 2011-04-12 |
| 7471392 | Polarimetric scatterometry methods for critical dimension measurements of periodic structures | Adam E. Norton, Abdurrahman Sezginer | 2008-12-30 |
| 7446887 | Matching optical metrology tools using hypothetical profiles | Holger Tuitje, Shigeru Nagano | 2008-11-04 |
| 7446888 | Matching optical metrology tools using diffraction signals | Holger Tuitje, Shigeru Nagano | 2008-11-04 |
| 7289219 | Polarimetric scatterometry methods for critical dimension measurements of periodic structures | Adam E. Norton, Abdurrahman Sezginer | 2007-10-30 |
| 7248362 | Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor | Adam E. Norton, Kenneth C. Johnson | 2007-07-24 |
| 7177019 | Apparatus for imaging metrology | Douglas E. Ruth, James Cahill, Michael Weber, Clinton Carlisle, Hung Pham +2 more | 2007-02-13 |
| 7158229 | Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor | Adam E. Norton, Kenneth C. Johnson | 2007-01-02 |
| 7099081 | Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor | Adam E. Norton, Kenneth C. Johnson | 2006-08-29 |
| 7069182 | Database interpolation method for optical measurement of diffractive microstructures | Kenneth C. Johnson | 2006-06-27 |
| 7049633 | Method of measuring meso-scale structures on wafers | Kenneth C. Johnson | 2006-05-23 |
| 7042569 | Overlay alignment metrology using diffraction gratings | Abdurrahman Sezginer, Kenneth C. Johnson | 2006-05-09 |
| 7042580 | Apparatus for imaging metrology | Clinton Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth, James Cahill +2 more | 2006-05-09 |
| 6950780 | Database interpolation method for optical measurement of diffractive microstructures | Kenneth C. Johnson | 2005-09-27 |
| 6919958 | Wafer metrology apparatus and method | Clinton Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth, James Cahill +3 more | 2005-07-19 |
| 6909507 | Polarimetric scatterometry methods for critical dimension measurements of periodic structures | Adam E. Norton, Abdurrahman Sezginer | 2005-06-21 |
| 6870617 | Accurate small-spot spectrometry systems and methods | Adam E. Norton, Abdurrahman Sezginer, Rodney Smedt | 2005-03-22 |
| 6850333 | Optimized aperture shape for optical CD/profile metrology | Kenneth C. Johnson | 2005-02-01 |
| 6829054 | Integrated surface metrology | Talat Hasan, Michael F. Weber | 2004-12-07 |
| 6819426 | Overlay alignment metrology using diffraction gratings | Abdurrahman Sezginer, Kenneth C. Johnson | 2004-11-16 |
| 6806105 | Method of measuring meso-scale structures on wafers | Kenneth C. Johnson | 2004-10-19 |
| 6778273 | Polarimetric scatterometer for critical dimension measurements of periodic structures | Adam E. Norton, Abdurrahman Sezginer | 2004-08-17 |