Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7283226 | Measurement system cluster | — | 2007-10-16 |
| 7254458 | Systems and methods for metrology recipe and model generation | — | 2007-08-07 |
| 7106433 | Measurement system cluster | — | 2006-09-12 |
| 7089075 | Systems and methods for metrology recipe and model generation | — | 2006-08-08 |
| 6999164 | Measurement system cluster | — | 2006-02-14 |
| 6829054 | Integrated surface metrology | Fred E. Stanke, Michael F. Weber | 2004-12-07 |
| 6690473 | Integrated surface metrology | Fred E. Stanke, Michael F. Weber | 2004-02-10 |
| 6182510 | Apparatus and method for characterizing semiconductor wafers during processing | Fred E. Stanke, B. T. Khuri-Yakub, Hung Pham | 2001-02-06 |
| 6112595 | Apparatus and method for characterizing semiconductor wafers during processing | Fred E. Stanke, Butrus T. Khuri-Yakub, Hung Pham | 2000-09-05 |
| 5996415 | Apparatus and method for characterizing semiconductor wafers during processing | Fred E. Stanke, Butrus T. Khuri-Yakub, Hung Pham | 1999-12-07 |