Issued Patents All Time
Showing 1–25 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11561476 | UV lithography system | — | 2023-01-24 |
| 11520235 | EUV lithography system with diffraction optics | — | 2022-12-06 |
| 10025079 | Actinic, spot-scanning microscope for EUV mask inspection and metrology | — | 2018-07-17 |
| 9651874 | Scanned-spot-array DUV lithography system | — | 2017-05-16 |
| 9618313 | Methods for measuring distance | — | 2017-04-11 |
| 9612370 | EUV light source with spectral purity filter and power recycling | — | 2017-04-04 |
| 9188874 | Spot-array imaging system for maskless lithography and parallel confocal microscopy | — | 2015-11-17 |
| 9182209 | Methods for measuring distance | — | 2015-11-10 |
| 9097983 | Scanned-spot-array EUV lithography system | — | 2015-08-04 |
| 8994920 | Optical systems and methods for absorbance modulation | — | 2015-03-31 |
| 8687277 | Stacked-grating light modulator | — | 2014-04-01 |
| 7333200 | Overlay metrology method and apparatus using more than one grating per measurement direction | Abdurrahman Sezginer | 2008-02-19 |
| 7295315 | Focus and alignment sensors and methods for use with scanning microlens-array printer | — | 2007-11-13 |
| 7248362 | Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor | Adam E. Norton, Fred E. Stanke | 2007-07-24 |
| 7230704 | Diffracting, aperiodic targets for overlay metrology and method to detect gross overlay | Abdurrahman Sezginer, Hsu-Ting Huang | 2007-06-12 |
| 7224450 | Method and apparatus for position-dependent optical metrology calibration | Abdurrahman Sezginer, Adam E. Norton, Holger Tuitje | 2007-05-29 |
| 7215419 | Method and apparatus for position-dependent optical metrology calibration | Abdurrahman Sezginer, Adam E. Norton, Holger Tuitje | 2007-05-08 |
| 7170604 | Overlay metrology method and apparatus using more than one grating per measurement direction | Abdurrahman Sezginer | 2007-01-30 |
| 7158229 | Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor | Adam E. Norton, Fred E. Stanke | 2007-01-02 |
| 7116405 | Maskless, microlens EUV lithography system with grazing-incidence illumination optics | — | 2006-10-03 |
| 7099081 | Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor | Adam E. Norton, Fred E. Stanke | 2006-08-29 |
| 7095496 | Method and apparatus for position-dependent optical metrology calibration | Abdurrahman Sezginer, Adam E. Norton, Holger Tuitje | 2006-08-22 |
| 7069182 | Database interpolation method for optical measurement of diffractive microstructures | Fred E. Stanke | 2006-06-27 |
| 7069153 | CD metrology method | — | 2006-06-27 |
| 7049633 | Method of measuring meso-scale structures on wafers | Fred E. Stanke | 2006-05-23 |