Issued Patents All Time
Showing 26–50 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7043397 | Reduced multicubic database interpolation method for optical measurement of diffractive microstructures | — | 2006-05-09 |
| 7042569 | Overlay alignment metrology using diffraction gratings | Abdurrahman Sezginer, Fred E. Stanke | 2006-05-09 |
| 6950780 | Database interpolation method for optical measurement of diffractive microstructures | Fred E. Stanke | 2005-09-27 |
| 6947135 | Reduced multicubic database interpolation method for optical measurement of diffractive microstructures | — | 2005-09-20 |
| 6850333 | Optimized aperture shape for optical CD/profile metrology | Fred E. Stanke | 2005-02-01 |
| 6819426 | Overlay alignment metrology using diffraction gratings | Abdurrahman Sezginer, Fred E. Stanke | 2004-11-16 |
| 6806105 | Method of measuring meso-scale structures on wafers | Fred E. Stanke | 2004-10-19 |
| 6804003 | System for analyzing surface characteristics with self-calibrating capability | Haiming Wang, Patrick M. Maxton, Mehrdad Nikoonahad | 2004-10-12 |
| 6768967 | Database interpolation method for optical measurement of diffractive microstructures | Fred E. Stanke | 2004-07-27 |
| 6753961 | Spectroscopic ellipsometer without rotating components | Adam E. Norton, Fred E. Stanke, Abdurrahman Sezginer | 2004-06-22 |
| 6734968 | System for analyzing surface characteristics with self-calibrating capability | Haiming Wang, Patrick M. Maxton, Mehrdad Nikoonahad | 2004-05-11 |
| 6667805 | Small-spot spectrometry instrument with reduced polarization | Adam E. Norton, Fred E. Stanke | 2003-12-23 |
| 6628390 | Wafer alignment sensor using a phase-shifted microlens array | — | 2003-09-30 |
| 6623991 | Method of measuring meso-scale structures on wafers | Fred E. Stanke | 2003-09-23 |
| 6498685 | Maskless, microlens EUV lithography system | — | 2002-12-24 |
| 6489984 | Pixel cross talk suppression in digital microprinters | — | 2002-12-03 |
| 6424404 | Multi-stage microlens array | — | 2002-07-23 |
| 6392752 | Phase-measuring microlens microscopy | — | 2002-05-21 |
| 6360643 | Blade assembly for shear | Christopher A. Zurek | 2002-03-26 |
| 6340602 | Method of measuring meso-scale structures on wafers | Fred E. Stanke | 2002-01-22 |
| 6301000 | Dual-flexure light valve | — | 2001-10-09 |
| 6188519 | Bigrating light valve | — | 2001-02-13 |
| 6177980 | High-throughput, maskless lithography system | — | 2001-01-23 |
| 6161460 | Bearing assembly for shear | Christopher A. Zurek | 2000-12-19 |
| 6133986 | Microlens scanner for microlithography and wide-field confocal microscopy | — | 2000-10-17 |