Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261030 | Normal-incidence in-situ process monitor sensor | Ching-Ling Meng, Qiang Zhao, Hanyou Chu, Xinkang Tian | 2025-03-25 |
| 11961721 | Normal-incidence in-situ process monitor sensor | Ching-Ling Meng, Qiang Zhao, Hanyou Chu, Xinkang Tian | 2024-04-16 |
| 10978278 | Normal-incident in-situ process monitor sensor | Ching-Ling Meng, Qiang Zhao, Hanyou Chu, Xinkang Tian | 2021-04-13 |
| 10473525 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Ching-Ling Meng, Yan Chen, Mihail Mihaylov | 2019-11-12 |
| 9970818 | Spatially resolved optical emission spectroscopy (OES) in plasma processing | Junwei Bao, Ching-Ling Meng, Mihail Mihaylov, Yan Chen, Zheng Yan +2 more | 2018-05-15 |
| 9846088 | Differential acoustic time of flight measurement of temperature of semiconductor substrates | Jun Pei, Junwei Bao, Ching-Ling Meng, Mihail Mihaylov | 2017-12-19 |
| 9059038 | System for in-situ film stack measurement during etching and etch control method | Shifang Li, Junwei Bao, Hanyou Chu, Wen Jin, Ching-Ling Meng +4 more | 2015-06-16 |
| 8107073 | Diffraction order sorting filter for optical metrology | Adam E. Norton, Fred E. Stanke | 2012-01-31 |
| 7924422 | Calibration method for optical metrology | Fred E. Stanke, Adam E. Norton | 2011-04-12 |
| 7505148 | Matching optical metrology tools using spectra enhancement | Vi Vuong, Yan Chen | 2009-03-17 |
| 7446887 | Matching optical metrology tools using hypothetical profiles | Fred E. Stanke, Shigeru Nagano | 2008-11-04 |
| 7446888 | Matching optical metrology tools using diffraction signals | Fred E. Stanke, Shigeru Nagano | 2008-11-04 |
| 7428044 | Drift compensation for an optical metrology tool | Vi Vuong, Yan Chen | 2008-09-23 |
| 7224450 | Method and apparatus for position-dependent optical metrology calibration | Abdurrahman Sezginer, Kenneth C. Johnson, Adam E. Norton | 2007-05-29 |
| 7215419 | Method and apparatus for position-dependent optical metrology calibration | Abdurrahman Sezginer, Kenneth C. Johnson, Adam E. Norton | 2007-05-08 |
| 7095496 | Method and apparatus for position-dependent optical metrology calibration | Abdurrahman Sezginer, Kenneth C. Johnson, Adam E. Norton | 2006-08-22 |
| 5621220 | Apparatus for evaluating measuring values | Rudolf Muehlenbein, Karlheinz Schaust | 1997-04-15 |