Issued Patents All Time
Showing 26–45 of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768967 | Database interpolation method for optical measurement of diffractive microstructures | Kenneth C. Johnson | 2004-07-27 |
| 6753961 | Spectroscopic ellipsometer without rotating components | Adam E. Norton, Kenneth C. Johnson, Abdurrahman Sezginer | 2004-06-22 |
| 6738136 | Accurate small-spot spectrometry instrument | Adam E. Norton, Abdurrahman Sezginer, Rodney Smedt | 2004-05-18 |
| 6690473 | Integrated surface metrology | Talat Hasan, Michael F. Weber | 2004-02-10 |
| 6667805 | Small-spot spectrometry instrument with reduced polarization | Adam E. Norton, Kenneth C. Johnson | 2003-12-23 |
| 6623991 | Method of measuring meso-scale structures on wafers | Kenneth C. Johnson | 2003-09-23 |
| 6572456 | Bathless wafer measurement apparatus and method | Michael Weber-Grabau, Ivelin A. Anguelov, Edric Tong, Adam E. Norton, Badru D. Hyatt | 2003-06-03 |
| 6563586 | Wafer metrology apparatus and method | Clinton Carlisle, Hung Pham, Edric Tong, Douglas E. Ruth, James Cahill +2 more | 2003-05-13 |
| 6510395 | Method of detecting residue on a polished wafer | — | 2003-01-21 |
| 6340602 | Method of measuring meso-scale structures on wafers | Kenneth C. Johnson | 2002-01-22 |
| 6188643 | Method and apparatus for inspecting well bore casing | Kenneth K. Liang, Philippe Herve | 2001-02-13 |
| 6182510 | Apparatus and method for characterizing semiconductor wafers during processing | B. T. Khuri-Yakub, Hung Pham, Talat Hasan | 2001-02-06 |
| 6112595 | Apparatus and method for characterizing semiconductor wafers during processing | Butrus T. Khuri-Yakub, Hung Pham, Talat Hasan | 2000-09-05 |
| 6019000 | In-situ measurement of deposition on reactor chamber members | Butrus T. Khuri-Yakub, Fahrettin Levent Degertekin, Hung Pham | 2000-02-01 |
| 6018496 | Method and apparatus for hydraulic isolation determination | Ralph M. D'Angelo | 2000-01-25 |
| 5996415 | Apparatus and method for characterizing semiconductor wafers during processing | Butrus T. Khuri-Yakub, Hung Pham, Talat Hasan | 1999-12-07 |
| 5859811 | Method of analyzing waveforms | Douglas E. Miller | 1999-01-12 |
| 5717169 | Method and apparatus for inspecting well bore casing | Kenneth K. Liang, Philippe Herve | 1998-02-10 |
| 5274604 | Method for spatially filtering signals representing formation and channel echoes in a borehole environment | Ralph M. D'Angelo, Hung-Wen Chang, Kai Hsu | 1993-12-28 |
| 4928269 | Determining impedance of material behind a casing in a borehole | Christopher Kimball, Curtis Randall, Andrew Hayman | 1990-05-22 |