Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653253 | Plasma-based material modification using a plasma source with magnetic confinement | William F. DiVergilio, Stephen E. Savas, Susan Felch, Hao Chen | 2017-05-16 |
| 7687784 | Method and device of ion source generation | Nai-Yuan Cheng, Yun-Ju Yang, Cheng-Hui Shen, Junhua Hong, Jiong Chen +1 more | 2010-03-30 |
| 6132513 | Process chemistry resistant manometer | Babak Kadkhodayan, Andreas Fischer, Gregory A. Tomasch | 2000-10-17 |
| 5711812 | Apparatus for obtaining dose uniformity in plasma doping (PLAD) ion implantation processes | David L. Chapek, Susan Felch, Michael William Kissick, Shamim M. Malik | 1998-01-27 |