Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653253 | Plasma-based material modification using a plasma source with magnetic confinement | William F. DiVergilio, Stephen E. Savas, Tienyu Sheng, Hao Chen | 2017-05-16 |
| 8999798 | Methods for forming NMOS EPI layers | Mitchell Taylor | 2015-04-07 |
| 5711812 | Apparatus for obtaining dose uniformity in plasma doping (PLAD) ion implantation processes | David L. Chapek, Michael William Kissick, Shamim M. Malik, Tienyu Sheng | 1998-01-27 |
| 5572038 | Charge monitor for high potential pulse current dose measurement apparatus and method | Terry Sheng, Charles Cooper, Charles E. Van Wagoner | 1996-11-05 |
| 4807994 | Method of mapping ion implant dose uniformity | Ronald A. Powell | 1989-02-28 |
| 4764026 | Semiconductor wafer temperature measuring device and method | Ronald A. Powell | 1988-08-16 |