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USPTO Patent Rankings Data through Dec 31, 2025
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Stephen E. Savas — 62 Patents

MTMattson Technology: 33 patents #3 of 230Top 2%
ASAixtron Se: 7 patents #2 of 116Top 2%
BCBeijing E-Town Semiconductor Technology Co.: 7 patents #12 of 72Top 20%
CUComet Technologies Usa: 7 patents #4 of 17Top 25%
AIAixtron: 4 patents #9 of 62Top 15%
Applied Materials: 2 patents #3,681 of 7,310Top 55%
SASandia: 2 patents #552 of 2,107Top 30%
ATAdvanced Ion Beam Technology: 2 patents #24 of 69Top 35%
Pleasanton, CA: #59 of 3,062 inventorsTop 2%
California: #5,560 of 386,348 inventorsTop 2%
Overall (All Time): #36,550 of 4,157,543Top 1%
62 Patents All Time
Stephen E. Savas has been granted 62 US patents while listed as an inventor at Mattson Technology. The first was granted in 1992 and the most recent in December 2025. Stephen E. Savas ranks #36,550 of 4,157,543 US inventors in our database (top 0.88%). Patent records list Stephen E. Savas in Pleasanton, CA, US.

Issued Patents All Time

Showing 1–25 of 62 patents

Patent #TitleCo-InventorsDateApprox Value ⓘ
12505984 Pulsing control match network and generator Alexandre De Chambrier 2025-12-23
12362136 Apparatus and method for measuring pedestal voltage uniformity in plasma processing chambers — 2025-07-15
12347677 Enhanced ignition in inductively coupled plasmas for workpiece processing Shawming Ma 2025-07-01
12272532 Inductive broad-band sensors for electromagnetic waves Alexandre De Chambrier, Ivan Shkurenkov 2025-04-08
12027351 Plasma non-uniformity detection Alexandre De Chambrier 2024-07-02
12002652 Variable mode plasma chamber utilizing tunable plasma potential Shawming Ma 2024-06-04
11887820 Sector shunts for plasma-based wafer processing systems Alexandre De Chambrier 2024-01-30
11848204 Enhanced ignition in inductively coupled plasmas for workpiece processing Shawming Ma 2023-12-19
11830708 Inductive broad-band sensors for electromagnetic waves Alexandre De Chambrier 2023-11-28
11670488 Fast arc detecting match network Alexandre De Chambrier 2023-06-06
11605527 Pulsing control match network Alexandre De Chambrier 2023-03-14
11521832 Uniformity control for radio frequency plasma processing systems Alexandre De Chambrier 2022-12-06
11348784 Enhanced ignition in inductively coupled plasmas for workpiece processing Shawming Ma 2022-05-31
11251075 Systems and methods for workpiece processing using neutral atom beams — 2022-02-15
11189464 Variable mode plasma chamber utilizing tunable plasma potential Shawming Ma 2021-11-30
11049692 Methods for tuning plasma potential using variable mode plasma chamber Shawming Ma 2021-06-29
10544519 Method and apparatus for surface preparation prior to epitaxial deposition Miguel Saldana, Dan Cossentine, Hae Young Kim, Subramanian Tamilmani, Niloy Mukherjee +1 more 2020-01-28
10526708 Methods for forming thin protective and optical layers on substrates Carl Galewski, Hood Chatham, Sai Mantripragada, Allan B. Wiesnoski, Sooyun Joh 2020-01-07
10294562 Exhaust manifold in a CVD reactor Carl Galewski, Merim MUKINOVIC 2019-05-21
10049859 Plasma generating units for processing a substrate Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh 2018-08-14
9852887 Ion source of an ion implanter Xiao Bai, Zhimin Wan, Peter M. Kopalidis 2017-12-26
9831466 Method for depositing a multi-layer moisture barrier on electronic devices and electronic devices protected by a multi-layer moisture barrier Allan B. Wiesnoski, Carl Galewski 2017-11-28
9721759 System and method for distributing RF power to a plasma source Richard K. Karlquist, Robert Eugene Weisse 2017-08-01
9653253 Plasma-based material modification using a plasma source with magnetic confinement William F. DiVergilio, Susan Felch, Tienyu Sheng, Hao Chen 2017-05-16
9443702 Methods for plasma processing Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh 2016-09-13 $422,000

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