Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272532 | Inductive broad-band sensors for electromagnetic waves | Stephen E. Savas, Ivan Shkurenkov | 2025-04-08 |
| 12027351 | Plasma non-uniformity detection | Stephen E. Savas | 2024-07-02 |
| 11961711 | Radio frequency match network and generator | — | 2024-04-16 |
| 11887820 | Sector shunts for plasma-based wafer processing systems | Stephen E. Savas | 2024-01-30 |
| 11830708 | Inductive broad-band sensors for electromagnetic waves | Stephen E. Savas | 2023-11-28 |
| 11670488 | Fast arc detecting match network | Stephen E. Savas | 2023-06-06 |
| 11605527 | Pulsing control match network | Stephen E. Savas | 2023-03-14 |
| 11521832 | Uniformity control for radio frequency plasma processing systems | Stephen E. Savas | 2022-12-06 |
| 5986874 | Electrostatic support assembly having an integral ion focus ring | Eric D. Ross, Jae Kyu Park | 1999-11-16 |