Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6375750 | Plasma enhanced chemical processing reactor and method | Ron van Os, William J. Durbin, Richard H. Matthiesen, Dennis C. Fenske | 2002-04-23 |
| 6178918 | Plasma enhanced chemical processing reactor | Ron van Os, William J. Durbin, Richard H. Matthiesen, Dennis C. Fenske | 2001-01-30 |
| 6001267 | Plasma enchanced chemical method | Ron van Os, William J. Durbin, Richard H. Matthiesen, Dennis C. Fenske | 1999-12-14 |
| 5986874 | Electrostatic support assembly having an integral ion focus ring | Jae Kyu Park, Alexandre De Chambrier | 1999-11-16 |
| 5838528 | Electrostatic chuck assembly | Ron van Os | 1998-11-17 |
| 5792272 | Plasma enhanced chemical processing reactor and method | Ron van Os, William J. Durbin, Richard H. Matthiesen, Dennis C. Fenske | 1998-08-11 |
| 5708556 | Electrostatic chuck assembly | Ron van Os | 1998-01-13 |