Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Enhanced ignition in inductively coupled plasmas for workpiece processing

Enhanced ignition in inductively coupled plasmas for workpiece processing

US Patent 12347677 · Granted Jul 1, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pulsing control match network and generator2025
Apparatus and method for measuring pedestal voltage uniformity in plasma process2025
Inductive broad-band sensors for electromagnetic waves2025
Atomic layer etch process using plasma in conjunction with a rapid thermal activ2024
Arc lamp with forming gas for thermal processing systems2024
Plasma non-uniformity detection2024
Variable mode plasma chamber utilizing tunable plasma potential2024
Variable mode plasma chamber utilizing tunable plasma potential2024
Sector shunts for plasma-based wafer processing systems2024
Enhanced ignition in inductively coupled plasmas for workpiece processing2023
Enhanced ignition in inductively coupled plasmas for workpiece processing2023
Inductive broad-band sensors for electromagnetic waves2023