Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10526708 | Methods for forming thin protective and optical layers on substrates | Stephen E. Savas, Carl Galewski, Hood Chatham, Sai Mantripragada, Sooyun Joh | 2020-01-07 |
| 10049859 | Plasma generating units for processing a substrate | Stephen E. Savas, Carl Galewski, Sai Mantripragada, Sooyun Joh | 2018-08-14 |
| 9831466 | Method for depositing a multi-layer moisture barrier on electronic devices and electronic devices protected by a multi-layer moisture barrier | Stephen E. Savas, Carl Galewski | 2017-11-28 |
| 9443702 | Methods for plasma processing | Stephen E. Savas, Carl Galewski, Sai Mantripragada, Sooyun Joh | 2016-09-13 |
| 9359674 | Apparatus and method for dielectric deposition | Stephen E. Savas, Sai Mantripragada, Sooyun Joh, Carl Galewski | 2016-06-07 |
| 9299956 | Method for deposition of high-performance coatings and encapsulated electronic devices | Stephen E. Savas, Hood Chatham, Carl Galewski | 2016-03-29 |
| 9096932 | Methods for plasma processing | Stephen E. Savas, Carl Galewski, Sai Mantripragada, Sooyun Joh | 2015-08-04 |
| 9096933 | Methods for plasma processing | Stephen E. Savas, Carl Galewski, Sai Mantripragada, Sooyun Joh | 2015-08-04 |
| 8765232 | Apparatus and method for dielectric deposition | Stephen E. Savas, Sai Mantripragada, Sooyun Joh, Carl Galewski | 2014-07-01 |
| 8697197 | Methods for plasma processing | Stephen E. Savas, Carl Galewski, Sai Mantripragada, Sooyun Joh | 2014-04-15 |
| 6624082 | Systems and methods for two-sided etch of a semiconductor substrate | Laizhong Luo, Ying Holden, Rene George, Robert Guerra, Nicole Kuhl +2 more | 2003-09-23 |
| 6335293 | Systems and methods for two-sided etch of a semiconductor substrate | Laizhong Luo, Ying Holden, Rene George, Robert Guerra, Nicole Kuhl +2 more | 2002-01-01 |