Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6236023 | Cleaning process for rapid thermal processing system | Martin L. Hammond, Jean-François Daviet | 2001-05-22 |
| 6198074 | System and method for rapid thermal processing with transitional heater | — | 2001-03-06 |
| 6169271 | Model based method for wafer temperature control in a thermal processing system for semiconductor manufacturing | Martin L. Hammond, Robert Mueller, Jean-François Daviet | 2001-01-02 |
| 6143129 | Inductive plasma reactor | Brad S. Mattson, Martin L. Hammond, Steven C. Selbrede | 2000-11-07 |
| 6133550 | Method and apparatus for thermal processing of semiconductor substrates | Stewart Griffiths, Robert H. Nilson, Brad S. Mattson | 2000-10-17 |
| 5983828 | Apparatus and method for pulsed plasma processing of a semiconductor substrate | — | 1999-11-16 |
| 5964949 | ICP reactor having a conically-shaped plasma-generating section | — | 1999-10-12 |
| 5811022 | Inductive plasma reactor | Brad S. Mattson | 1998-09-22 |
| 5534231 | Low frequency inductive RF plasma reactor | — | 1996-07-09 |
| 5225024 | Magnetically enhanced plasma reactor system for semiconductor processing | Peter R. Hanley, Karl B. Levy, Neeta Jha, Kevin G. Donohoe | 1993-07-06 |
| 5102496 | Particulate contamination prevention using low power plasma | — | 1992-04-07 |