Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551447 | Inductive plasma reactor | Stephen E. Savas, Brad S. Mattson, Steven C. Selbrede | 2003-04-22 |
| 6236023 | Cleaning process for rapid thermal processing system | Stephen E. Savas, Jean-François Daviet | 2001-05-22 |
| 6169271 | Model based method for wafer temperature control in a thermal processing system for semiconductor manufacturing | Stephen E. Savas, Robert Mueller, Jean-François Daviet | 2001-01-02 |
| 6143129 | Inductive plasma reactor | Stephen E. Savas, Brad S. Mattson, Steven C. Selbrede | 2000-11-07 |
| 4694779 | Reactor apparatus for semiconductor wafer processing | Charles L. Ramiller | 1987-09-22 |