Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6554953 | Thin film electrostatic shield for inductive plasma processing | — | 2003-04-29 |
| 6342691 | Apparatus and method for thermal processing of semiconductor substrates | Kristian E. Johnsgard, James A. Givens, Stephen E. Savas, Brad S. Mattson, Ashur J. ATANOS | 2002-01-29 |
| 6321681 | Method and apparatus to produce large inductive plasma for plasma processing | Pascal Colpo, François Rossi, Roland Ernst | 2001-11-27 |
| 6312555 | Thin film electrostatic shield for inductive plasma processing | — | 2001-11-06 |
| 6236023 | Cleaning process for rapid thermal processing system | Stephen E. Savas, Martin L. Hammond | 2001-05-22 |
| 6169271 | Model based method for wafer temperature control in a thermal processing system for semiconductor manufacturing | Stephen E. Savas, Martin L. Hammond, Robert Mueller | 2001-01-02 |
| 6056848 | Thin film electrostatic shield for inductive plasma processing | — | 2000-05-02 |