Issued Patents All Time
Showing 26–50 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299956 | Method for deposition of high-performance coatings and encapsulated electronic devices | Allan B. Wiesnoski, Hood Chatham, Carl Galewski | 2016-03-29 |
| 9184072 | Advanced multi-workpiece processing chamber | Daniel J. Devine, Charles Crapuchettes, Dixit V. Desai, Rene George, Vincent Lee +4 more | 2015-11-10 |
| 9096933 | Methods for plasma processing | Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh | 2015-08-04 |
| 9096932 | Methods for plasma processing | Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh | 2015-08-04 |
| 8765232 | Apparatus and method for dielectric deposition | Sai Mantripragada, Sooyun Joh, Allan B. Wiesnoski, Carl Galewski | 2014-07-01 |
| 8697197 | Methods for plasma processing | Carl Galewski, Allan B. Wiesnoski, Sai Mantripragada, Sooyun Joh | 2014-04-15 |
| 8413604 | Slotted electrostatic shield modification for improved etch and CVD process uniformity | Rene George, Andreas Kadavanich, Daniel J. Devine, John Zajac, Hongching Shan | 2013-04-09 |
| 8236706 | Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures | Bruce W. Peuse, Yaozhi Hu, Paul Janis Timans, Guangcai Xing, Wilfried Lerch +4 more | 2012-08-07 |
| 7947605 | Post ion implant photoresist strip using a pattern fill and method | Rene George | 2011-05-24 |
| 7799685 | System and method for removal of photoresist in transistor fabrication for integrated circuit manufacturing | Songlin Xu, David Dutton, Andreas Kadavanich, Rene George | 2010-09-21 |
| 7534362 | Uniform etching system and process for large rectangular substrates | — | 2009-05-19 |
| 7361605 | System and method for removal of photoresist and residues following contact etch with a stop layer present | Wolfgang Helle | 2008-04-22 |
| 7232767 | Slotted electrostatic shield modification for improved etch and CVD process uniformity | Rene George, Andreas Kadavanich, Daniel J. Devine, John Zajac, Hongching Shan | 2007-06-19 |
| 6838387 | Fast etching system and process | John Zajac | 2005-01-04 |
| 6805139 | Systems and methods for photoresist strip and residue treatment in integrated circuit manufacturing | John Zajac, Robert Guerra, Wolfgang Helle | 2004-10-19 |
| 6794301 | Pulsed plasma processing of semiconductor substrates | — | 2004-09-21 |
| 6706142 | Systems and methods for enhancing plasma processing of a semiconductor substrate | John Zajac, Mark Kushner, Ronald L. Kinder | 2004-03-16 |
| 6551447 | Inductive plasma reactor | Brad S. Mattson, Martin L. Hammond, Steven C. Selbrede | 2003-04-22 |
| 6501636 | Electrostatic clamp for holding workpieces with irregular surfaces | John Zajac | 2002-12-31 |
| 6395641 | Apparatus and method for pulsed plasma processing of a semiconductor substrate | — | 2002-05-28 |
| 6379576 | Systems and methods for variable mode plasma enhanced processing of semiconductor wafers | Leroy Luo, Rene George, Craig Ranft, Wolfgang Helle, Robert Guerra | 2002-04-30 |
| 6355909 | Method and apparatus for thermal processing of semiconductor substrates | Stewart Griffiths, Robert H. Nilson, Brad S. Mattson | 2002-03-12 |
| 6342691 | Apparatus and method for thermal processing of semiconductor substrates | Kristian E. Johnsgard, Jean-François Daviet, James A. Givens, Brad S. Mattson, Ashur J. ATANOS | 2002-01-29 |
| 6331697 | System and method for rapid thermal processing | — | 2001-12-18 |
| 6253704 | Apparatus and method for pulsed plasma processing of a semiconductor substrate | — | 2001-07-03 |