Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6379576 | Systems and methods for variable mode plasma enhanced processing of semiconductor wafers | Rene George, Stephen E. Savas, Craig Ranft, Wolfgang Helle, Robert Guerra | 2002-04-30 |
| 6207583 | Photoresist ashing process for organic and inorganic polymer dielectric materials | Jude Dunne, Joseph Kennedy, Diane Cecile Howell, Nicole Kuhl | 2001-03-27 |