Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624082 | Systems and methods for two-sided etch of a semiconductor substrate | Laizhong Luo, Ying Holden, Rene George, Robert Guerra, Allan B. Wiesnoski +2 more | 2003-09-23 |
| 6536449 | Downstream surface cleaning process | Wolfgang Helle, Robert Guerra, Brady Cole | 2003-03-25 |
| 6379576 | Systems and methods for variable mode plasma enhanced processing of semiconductor wafers | Leroy Luo, Rene George, Stephen E. Savas, Wolfgang Helle, Robert Guerra | 2002-04-30 |
| 6335293 | Systems and methods for two-sided etch of a semiconductor substrate | Laizhong Luo, Ying Holden, Rene George, Robert Guerra, Allan B. Wiesnoski +2 more | 2002-01-01 |