Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653264 | Inductively coupled plasma source for plasma processing | Vladimir Nagorny, Dongsoo Lee | 2017-05-16 |
| 8413604 | Slotted electrostatic shield modification for improved etch and CVD process uniformity | Rene George, Daniel J. Devine, Stephen E. Savas, John Zajac, Hongching Shan | 2013-04-09 |
| 7799685 | System and method for removal of photoresist in transistor fabrication for integrated circuit manufacturing | Stephen E. Savas, Songlin Xu, David Dutton, Rene George | 2010-09-21 |
| 7232767 | Slotted electrostatic shield modification for improved etch and CVD process uniformity | Rene George, Daniel J. Devine, Stephen E. Savas, John Zajac, Hongching Shan | 2007-06-19 |