Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8449731 | Method and apparatus for increasing local plasma density in magnetically confined plasma | Anshu A. Pradhan, Douglas B. Hayden, Alexander Dulkin | 2013-05-28 |
| 7964504 | PVD-based metallization methods for fabrication of interconnections in semiconductor devices | Roey Shaviv, Alexander Dulkin, Daniel R. Juliano | 2011-06-21 |
| 7922880 | Method and apparatus for increasing local plasma density in magnetically confined plasma | Anshu A. Pradhan, Douglas B. Hayden, Alexander Dulkin | 2011-04-12 |
| 7897516 | Use of ultra-high magnetic fields in resputter and plasma etching | Anshu A. Pradhan | 2011-03-01 |
| 6706142 | Systems and methods for enhancing plasma processing of a semiconductor substrate | Stephen E. Savas, John Zajac, Mark Kushner | 2004-03-16 |