Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164724 | Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing | Sang Won Kang, Nicholas Celeste, Dmitry Lubomirsky, Peter M. Hillman, Dongqing Yang | 2021-11-02 |
| 10008366 | Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing | Sang Won Kang, Nicholas Celeste, Dmitry Lubomirsky, Peter M. Hillman, Dongqing Yang | 2018-06-26 |
| 8449731 | Method and apparatus for increasing local plasma density in magnetically confined plasma | Anshu A. Pradhan, Ronald L. Kinder, Alexander Dulkin | 2013-05-28 |
| 7922880 | Method and apparatus for increasing local plasma density in magnetically confined plasma | Anshu A. Pradhan, Ronald L. Kinder, Alexander Dulkin | 2011-04-12 |
| 7892405 | Methods and apparatus for magnetron sputtering | Daniel R. Juliano | 2011-02-22 |
| 7781327 | Resputtering process for eliminating dielectric damage | Sridhar Karthik Kailasam, Robert T. Rozbicki, Chentao Yu | 2010-08-24 |
| 7585399 | Rotating magnet arrays for magnetron sputtering apparatus | Kwok Fai Lai, Kang Song | 2009-09-08 |
| 7569123 | Optimizing target erosion using multiple erosion regions in a magnetron sputtering apparatus | Daniel R. Juliano | 2009-08-04 |
| 7179351 | Methods and apparatus for magnetron sputtering | Daniel R. Juliano | 2007-02-20 |