Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164724 | Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing | Sang Won Kang, Dmitry Lubomirsky, Peter M. Hillman, Douglas B. Hayden, Dongqing Yang | 2021-11-02 |
| 10008366 | Seasoning process for establishing a stable process and extending chamber uptime for semiconductor chip processing | Sang Won Kang, Dmitry Lubomirsky, Peter M. Hillman, Douglas B. Hayden, Dongqing Yang | 2018-06-26 |
| 9659753 | Grooved insulator to reduce leakage current | Tae Seung Cho, Sang Won Kang, Dongqing Yang, Raymond W. Lu, Peter M. Hillman +3 more | 2017-05-23 |