Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852887 | Ion source of an ion implanter | Stephen E. Savas, Xiao Bai, Zhimin Wan | 2017-12-26 |
| 8890506 | Apparatus and method for measuring ion beam current | Zhimin Wan | 2014-11-18 |
| 8653807 | Apparatus and method for measuring ion beam current | Zhimin Wan | 2014-02-18 |
| 6259105 | System and method for cleaning silicon-coated surfaces in an ion implanter | Ronald Eddy | 2001-07-10 |
| 6221169 | System and method for cleaning contaminated surfaces in an ion implanter | James D. Bernstein, Brian S. Freer | 2001-04-24 |