PK

Peter M. Kopalidis

AT Advanced Ion Beam Technology: 3 patents #17 of 69Top 25%
AT Axcelis Technologies: 2 patents #105 of 300Top 35%
Overall (All Time): #995,784 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Showing 1–5 of 5 patents

Patent #TitleCo-InventorsDate
9852887 Ion source of an ion implanter Stephen E. Savas, Xiao Bai, Zhimin Wan 2017-12-26
8890506 Apparatus and method for measuring ion beam current Zhimin Wan 2014-11-18
8653807 Apparatus and method for measuring ion beam current Zhimin Wan 2014-02-18
6259105 System and method for cleaning silicon-coated surfaces in an ion implanter Ronald Eddy 2001-07-10
6221169 System and method for cleaning contaminated surfaces in an ion implanter James D. Bernstein, Brian S. Freer 2001-04-24