Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9103031 | Method and system for growing a thin film using a gas cluster ion beam | John Hautala, Michael Graf, Yan Shao | 2015-08-11 |
| 8168941 | Ion beam angle calibration and emittance measurement system for ribbon beams | Marvin Farley, Donald N. Polner, Geoffrey Ryding, Theodore H. Smick, Takao Sakase +5 more | 2012-05-01 |
| 7598495 | Methods and systems for trapping ion beam particles and focusing an ion beam | Peter L. Kellerman, Victor M. Benveniste, Alexander S. Perel, Michael Graf | 2009-10-06 |
| 7557363 | Closed loop dose control for ion implantation | Yongzhang Huang, John Zheng Ye, Christopher Godfrey, Michael Graf, Patrick Splinter | 2009-07-07 |
| 7476876 | Ion beam angle measurement systems and methods employing varied angle slot arrays for ion implantation systems | — | 2009-01-13 |
| 7435977 | Ion beam angle measurement systems and methods for ion implantation systems | Alexander S. Perel | 2008-10-14 |
| 6828572 | Ion beam incident angle detector for ion implant systems | Ronald N. Reece, Michael Graf, Thomas Parrill | 2004-12-07 |
| 6221169 | System and method for cleaning contaminated surfaces in an ion implanter | James D. Bernstein, Peter M. Kopalidis | 2001-04-24 |
| 6215125 | Method to operate GEF4 gas in hot cathode discharge ion sources | Jiong Chen, John Francis Grant, Lawrence T. Jacobs, Joseph L. Malenfant, Jr. | 2001-04-10 |
| 5909031 | Ion implanter electron shower having enhanced secondary electron emission | Peter L. Kellerman, James D. Bernstein | 1999-06-01 |
| 5903009 | Biased and serrated extension tube for ion implanter electron shower | James D. Bernstein, Peter L. Kellerman | 1999-05-11 |