Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977628 | System and method for reducing particles and contamination by matching beam complementary aperture shapes to beam shapes | Patrick Splinter | 2011-07-12 |
| 6215125 | Method to operate GEF4 gas in hot cathode discharge ion sources | Jiong Chen, Brian S. Freer, Lawrence T. Jacobs, Joseph L. Malenfant, Jr. | 2001-04-10 |