Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903097 | In-situ wafer temperature measurement and control | John F. Baggett, Petros Miltiades Kopalidis | 2021-01-26 |
| 9490185 | Implant-induced damage control in ion implantation | Shu Satoh, Serguei Kondratenko, Andy Ray | 2016-11-08 |
| 7511287 | Systems and methods that mitigate contamination and modify surface characteristics during ion implantation processes through the introduction of gases | Serguei Kondratenko, Geumjoo Ra, Louis P. Wainwright, Gary N. Cai | 2009-03-31 |
| 6828572 | Ion beam incident angle detector for ion implant systems | Michael Graf, Thomas Parrill, Brian S. Freer | 2004-12-07 |