Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11646175 | Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose control | James DeLuca, Neil Demario, Rosario Mollica | 2023-05-09 |
| 10483086 | Beam profiling speed enhancement for scanned beam implanters | Edward C. Eisner, Bo H. Vanderberg | 2019-11-19 |
| 9711329 | System and method to improve productivity of hybrid scan ion beam implanters | Bo H. Vanderberg | 2017-07-18 |
| 9490185 | Implant-induced damage control in ion implantation | Ronald N. Reece, Shu Satoh, Serguei Kondratenko | 2016-11-08 |
| 9147554 | Use of beam scanning to improve uniformity and productivity of a 2D mechanical scan implantation system | — | 2015-09-29 |
| 8502173 | System and method for ion implantation with improved productivity and uniformity | Bo H. Vanderberg, Steven C. Hays | 2013-08-06 |
| 8378313 | Uniformity of a scanned ion beam | Edward C. Eisner, Bo H. Vanderberg | 2013-02-19 |
| 8278634 | System and method for ion implantation with improved productivity and uniformity | Bo H. Vanderberg, Steven C. Hays | 2012-10-02 |