Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11646175 | Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose control | James DeLuca, Andy Ray, Rosario Mollica | 2023-05-09 |
| 5525807 | Ion implantation device | Suguru Hirokawa, Frank Sinclair | 1996-06-11 |