PK

Petros Miltiades Kopalidis

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
📍 Swampscott, MA: #134 of 203 inventorsTop 70%
🗺 Massachusetts: #56,664 of 88,656 inventorsTop 65%
Overall (All Time): #2,706,836 of 4,157,543Top 70%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10903097 In-situ wafer temperature measurement and control John F. Baggett, Ronald N. Reece 2021-01-26