Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gripper for supporting substrate in a vertical orientation

Gripper for supporting substrate in a vertical orientation

US Patent 6474712 · Granted Nov 5, 2002

Estimated economic value: $31,691,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Porous plug for electrostatic chuck gas delivery2025
Imaging systems and methods for image-guided radiosurgery2025
Lift pin mechanism2025
Plasma resistant arc preventative coatings for manufacturing equipment component2025
Lift pin assembly2024
Therapeutic radiation beam detector for radiation treatment systems2023
Revolving radiation collimator2023
Sheath and temperature control of a process kit in a substrate processing chambe2023
Helical plug for reduction or prevention of arcing in a substrate support2023
Scroll activity detection for selection and display of information2023
Methods and apparatus for reducing high voltage arcing in semiconductor process 2022
Temperature controlled secondary electrode for ion control at substrate edge2022