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System for electropolishing and electrochemical mechanical polishing |
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2008-09-23 |
| 7059944 |
Integrated system for processing semiconductor wafers |
Jalal Ashjaee, Bernard Frey, Boguslaw Nagorski, Douglas W. Young, Bulent M. Basol +1 more |
2006-06-13 |
| 6626476 |
Robotic gripper apparatus |
Constantin Foxman |
2003-09-30 |
| 6520315 |
Gripper assembly |
Michael Sugarman |
2003-02-18 |
| 6517415 |
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system |
Steven M. Zuniga, Hung Chih Chen, Sasson Somekh |
2003-02-11 |
| 6474712 |
Gripper for supporting substrate in a vertical orientation |
Manoocher Birang, Michael Sugarman, Anwar Husain |
2002-11-05 |
| 6454332 |
Apparatus and methods for handling a substrate |
Konstantin Volodarsky, Leon Volfovski |
2002-09-24 |
| 6386609 |
Gripper design to reduce backlash |
— |
2002-05-14 |
| 6244932 |
Method for detecting the presence of a substrate in a carrier head |
Steven M. Zuniga, Hung Chih Chen |
2001-06-12 |
| 5957751 |
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system |
Steven M. Zuniga, Hung Chih Chen, Sasson Somekh |
1999-09-28 |
