Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7427337 | System for electropolishing and electrochemical mechanical polishing | Bulent M. Basol, Jalal Ashjaee, Homayoun Talieh, Bernard Frey | 2008-09-23 |
| 7059944 | Integrated system for processing semiconductor wafers | Jalal Ashjaee, Bernard Frey, Boguslaw Nagorski, Douglas W. Young, Bulent M. Basol +1 more | 2006-06-13 |
| 6626476 | Robotic gripper apparatus | Constantin Foxman | 2003-09-30 |
| 6520315 | Gripper assembly | Michael Sugarman | 2003-02-18 |
| 6517415 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Steven M. Zuniga, Hung Chih Chen, Sasson Somekh | 2003-02-11 |
| 6474712 | Gripper for supporting substrate in a vertical orientation | Manoocher Birang, Michael Sugarman, Anwar Husain | 2002-11-05 |
| 6454332 | Apparatus and methods for handling a substrate | Konstantin Volodarsky, Leon Volfovski | 2002-09-24 |
| 6386609 | Gripper design to reduce backlash | — | 2002-05-14 |
| 6244932 | Method for detecting the presence of a substrate in a carrier head | Steven M. Zuniga, Hung Chih Chen | 2001-06-12 |
| 5957751 | Carrier head with a substrate detection mechanism for a chemical mechanical polishing system | Steven M. Zuniga, Hung Chih Chen, Sasson Somekh | 1999-09-28 |