Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699622 | Methods and apparatus for test pattern forming and film property measurement | Bulent M. Basol, Abhijeet Joshi | 2023-07-11 |
| 11289386 | Methods and apparatus for test pattern forming and film property measurement | Bulent M. Basol, Abhijeet Joshi | 2022-03-29 |
| 10790203 | Methods and systems for material property profiling of thin films | Bulent M. Basol, Abhijeet Joshi | 2020-09-29 |
| 8497152 | Roll-to-roll processing method and tools for electroless deposition of thin layers | — | 2013-07-30 |
| 8016007 | Method and apparatus for stringing thin film solar cells | Douglas W. Young, Kiet Tran, Steve Kuskie | 2011-09-13 |
| 7923281 | Roll-to-roll processing method and tools for electroless deposition of thin layers | Bulent M. Basol, Serkan Erdemli | 2011-04-12 |
| 7476304 | Apparatus for processing surface of workpiece with small electrodes and surface contacts | Boguslaw Nagorski, Bulent M. Basol, Homayoun Talieh, Cyprian Emeka Uzoh | 2009-01-13 |
| 7427337 | System for electropolishing and electrochemical mechanical polishing | Bulent M. Basol, Boris Govzman, Homayoun Talieh, Bernard Frey | 2008-09-23 |
| 7316602 | Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing | Bulent M. Basol, Konstantin Volodarsky | 2008-01-08 |
| 7122473 | Edge and bevel cleaning process and system | Rimma Volodarsky, Cyprian Emeka Uzoh, Bulent M. Basol, Homayoun Talieh | 2006-10-17 |
| 7059944 | Integrated system for processing semiconductor wafers | Boris Govzman, Bernard Frey, Boguslaw Nagorski, Douglas W. Young, Bulent M. Basol +1 more | 2006-06-13 |
| 6988932 | Apparatus of sealing wafer backside for full-face processing | Homayoun Talieh, Bulent M. Basol, Konstantin Volodarsky | 2006-01-24 |
| 6953392 | Integrated system for processing semiconductor wafers | Homayoun Talieh | 2005-10-11 |
| 6939206 | Method and apparatus of sealing wafer backside for full-face electrochemical plating | Homayoun Talieh, Bulent M. Basol, Konstantin Volodarsky | 2005-09-06 |
| 6932679 | Apparatus and method for loading a wafer in polishing system | Homayoun Talieh, Konstantin Volodarsky, Douglas W. Young | 2005-08-23 |
| 6855037 | Method of sealing wafer backside for full-face electrochemical plating | Homayoun Talieh, Bulent M. Basol, Konstantin Volodarsky | 2005-02-15 |
| 6852208 | Method and apparatus for full surface electrotreating of a wafer | Boguslaw Nagorski, Bulent M. Basol, Homayoun Talieh, Cyprian Emeka Uzoh | 2005-02-08 |
| 6777338 | Edge and bevel cleaning process and system | Rimma Volodarsky, Cyprian Emeka Uzoh, Bulent M. Basol, Homayoun Talieh | 2004-08-17 |
| 6736929 | Distributed control system for semiconductor manufacturing equipment | Srinivasan Komandur | 2004-05-18 |
| 6604988 | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein | Homayoun Talieh, Konstantin Volodarsky, Douglas W. Young | 2003-08-12 |
| 6482307 | Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing | Boguslaw Nagorski, Bulent M. Basol, Homayoun Talieh, Cyprian Emeka Uzoh | 2002-11-19 |
| 6468139 | Polishing apparatus and method with a refreshing polishing belt and loadable housing | Homayoun Talieh, Konstantin Volodarsky, Douglas W. Young | 2002-10-22 |
| 6464571 | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein | Homayoun Talieh, Konstantin Volodarsky, Douglas W. Young | 2002-10-15 |
| 4507078 | Wafer handling apparatus and method | Johann Tam, Nobuo Kuwaki, Tuan Ngo, Susan W. Kung | 1985-03-26 |