| 11699622 |
Methods and apparatus for test pattern forming and film property measurement |
Bulent M. Basol, Abhijeet Joshi |
2023-07-11 |
| 11289386 |
Methods and apparatus for test pattern forming and film property measurement |
Bulent M. Basol, Abhijeet Joshi |
2022-03-29 |
| 10790203 |
Methods and systems for material property profiling of thin films |
Bulent M. Basol, Abhijeet Joshi |
2020-09-29 |
| 8497152 |
Roll-to-roll processing method and tools for electroless deposition of thin layers |
— |
2013-07-30 |
| 8016007 |
Method and apparatus for stringing thin film solar cells |
Douglas W. Young, Kiet Tran, Steve Kuskie |
2011-09-13 |
| 7923281 |
Roll-to-roll processing method and tools for electroless deposition of thin layers |
Bulent M. Basol, Serkan Erdemli |
2011-04-12 |
| 7476304 |
Apparatus for processing surface of workpiece with small electrodes and surface contacts |
Boguslaw Nagorski, Bulent M. Basol, Homayoun Talieh, Cyprian Emeka Uzoh |
2009-01-13 |
| 7427337 |
System for electropolishing and electrochemical mechanical polishing |
Bulent M. Basol, Boris Govzman, Homayoun Talieh, Bernard Frey |
2008-09-23 |
| 7316602 |
Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing |
Bulent M. Basol, Konstantin Volodarsky |
2008-01-08 |
| 7122473 |
Edge and bevel cleaning process and system |
Rimma Volodarsky, Cyprian Emeka Uzoh, Bulent M. Basol, Homayoun Talieh |
2006-10-17 |
| 7059944 |
Integrated system for processing semiconductor wafers |
Boris Govzman, Bernard Frey, Boguslaw Nagorski, Douglas W. Young, Bulent M. Basol +1 more |
2006-06-13 |
| 6988932 |
Apparatus of sealing wafer backside for full-face processing |
Homayoun Talieh, Bulent M. Basol, Konstantin Volodarsky |
2006-01-24 |
| 6953392 |
Integrated system for processing semiconductor wafers |
Homayoun Talieh |
2005-10-11 |
| 6939206 |
Method and apparatus of sealing wafer backside for full-face electrochemical plating |
Homayoun Talieh, Bulent M. Basol, Konstantin Volodarsky |
2005-09-06 |
| 6932679 |
Apparatus and method for loading a wafer in polishing system |
Homayoun Talieh, Konstantin Volodarsky, Douglas W. Young |
2005-08-23 |
| 6855037 |
Method of sealing wafer backside for full-face electrochemical plating |
Homayoun Talieh, Bulent M. Basol, Konstantin Volodarsky |
2005-02-15 |
| 6852208 |
Method and apparatus for full surface electrotreating of a wafer |
Boguslaw Nagorski, Bulent M. Basol, Homayoun Talieh, Cyprian Emeka Uzoh |
2005-02-08 |
| 6777338 |
Edge and bevel cleaning process and system |
Rimma Volodarsky, Cyprian Emeka Uzoh, Bulent M. Basol, Homayoun Talieh |
2004-08-17 |
| 6736929 |
Distributed control system for semiconductor manufacturing equipment |
Srinivasan Komandur |
2004-05-18 |
| 6604988 |
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein |
Homayoun Talieh, Konstantin Volodarsky, Douglas W. Young |
2003-08-12 |
| 6482307 |
Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing |
Boguslaw Nagorski, Bulent M. Basol, Homayoun Talieh, Cyprian Emeka Uzoh |
2002-11-19 |
| 6468139 |
Polishing apparatus and method with a refreshing polishing belt and loadable housing |
Homayoun Talieh, Konstantin Volodarsky, Douglas W. Young |
2002-10-22 |
| 6464571 |
Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein |
Homayoun Talieh, Konstantin Volodarsky, Douglas W. Young |
2002-10-15 |
| 4507078 |
Wafer handling apparatus and method |
Johann Tam, Nobuo Kuwaki, Tuan Ngo, Susan W. Kung |
1985-03-26 |